Journal of Science and Geosciences

Extreme ultraviolet lithography

Abstract


Abiodun Musa

EUV (Extreme Ultraviolet) lithography uses an EUV light of the extremely short wavelength of 13.5 nm. It allows exposure of fine circuit patterns with a half-pitch below 20 nm that cannot be exposed by the conventional optical lithography using an ArF excimer laser. Putting it into practical use requires a variety of element technologies, including the light source, optics, masks, photoresist, and lithography tools.

https://linktr.ee/marmaris1 https://www.divephotoguide.com/user/marmaris1/ https://artmight.com/user/profile/2408931 https://allmyfaves.com/marmaris1 https://www.fimfiction.net/user/628252/marmaris https://www.drupalgovcon.org/user/568666 https://www.roleplaygateway.com/member/marmaris1/ https://www.kickstarter.com/profile/825997479/about https://tapas.io/sam659667 https://seedandspark.com/user/marmaris1 https://starity.hu/profil/386591-marmaris1/ https://www.informationweek.com/profile.asp https://nootheme.com/forums/users/marmaris1/ https://app.roll20.net/users/12308972/marmaris1-m https://www.360cities.net/profile/sam659667 https://fileforum.com/profile/marmaris1 https://wordpress.org/support/users/marmaris1/ https://www.hebergementweb.org/members/marmaris1.539143/ https://forum.cs-cart.com/u/marmaris1/ https://www.tntxtruck.com/User-Profile/UserId/12208 https://calis.delfi.lv/blogs/posts/205779-linkler/lietotajs/310821-marmaris1/ https://profile.ameba.jp/ameba/marmaris1/ https://www.avianwaves.com/User-Profile/userId/184770 https://engine.eatsleepride.com/rider/marmaris1 https://keymander.iogear.com/profile/53051/marmaris1 https://www.mifare.net/support/forum/users/marmaris1/ https://inkbunny.net/marmaris1?&success=Profile+settings+saved. https://www.diggerslist.com/64e0c4fad170b/about https://research.openhumans.org/member/me/ http://bluerevolutioncrowdfunding.crowdfundhq.com/users/marmaris1 https://www.cakeresume.com/me/marmaris1 https://educatorpages.com/site/marrmaris1/pages/about-me? https://gotartwork.com/Profile/marmaris1-marmaris1/253385/ https://www.facer.io/user/OGfo7VWrhR https://able2know.org/user/marmaris1/ https://www.techrum.vn/members/marmaris1.230749/#about http://foxsheets.statfoxsports.com/UserProfile/tabid/57/userId/145739/Default.aspx http://riosabeloco.com/User-Profile/userId/196075 http://phillipsservices.net/UserProfile/tabid/43/userId/245691/Default.aspx http://www.ramsa.ma/UserProfile/tabid/42/userId/962725/Default.aspx http://krachelart.com/UserProfile/tabid/43/userId/1242308/Default.aspx http://kedcorp.org/UserProfile/tabid/42/userId/72907/Default.aspx http://atlantabackflowtesting.com/UserProfile/tabid/43/userId/561626/Default.aspx https://www.intensedebate.com/people/marmaris12 https://rosalind.info/users/marmaris1/ https://wordpress.com/me https://photozou.jp/user/top/3342211

PDF

Share this article

Get the App